发明名称 OPTICAL WAVEGUIDE AND METHOD FOR MANUFACTURING THE SAME
摘要 The invention provides an optical waveguide including a resin substrate containing an inorganic filler, and at least a UV-absorbing layer, a lower cladding layer, a patterned core layer, and an upper cladding layer laminated above the resin substrate in this order, wherein the core layer has been patterned through light exposure and development, and the UV-absorbing layer has a thickness of 10 to 50 µm, and a method for producing an optical waveguide, including a step of forming a UV-absorbing layer on a resin substrate containing an inorganic filler; a step of forming a lower cladding layer on the UV-absorbing layer; a step of forming a core layer on the lower cladding layer; a step of subjecting the core layer to light exposure to thereby transfer a pattern having a given shape to the core layer; a step of developing the core layer to thereby form a core pattern; and a step of forming an upper cladding layer on the patterned core layer. According to the present invention, an optical waveguide having a high-resolution core pattern can be produced.
申请公布号 EP2237089(A1) 申请公布日期 2010.10.06
申请号 EP20080861030 申请日期 2008.12.11
申请人 HITACHI CHEMICAL COMPANY, LTD. 发明人 YAMAGUCHI, MASATOSHI;SHIBATA, TOMOAKI;OOHASHI, TAKESHI;TAKAHASHI, ATSUSHI
分类号 G02B6/12;G02B6/122;G02B6/13 主分类号 G02B6/12
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