Device for optical inspection of a surface on an object

摘要

The device (10) has an accommodator (54) for positioning an object (56) with a surface area (58) relative to a sample (28), and an intensity curve (31) falling from the surface area. A control unit (20) adjusts the intensity curve relative to the surface area along a sliding distance from variable positions relative to the intensity curve. An image acquisition device (50) is provided for accommodating variable images, and includes the surface area with the intensity curve on the variable positions. An evaluation unit (46) assigns characteristics on the surface area depending upon the images.