HEATER CONTROLLER AND CONTROL METHOD FOR SEMICONDUCTOR MANUFACTURING EQUIPMENTS

摘要

PURPOSE: A heater control device and a method thereof are provided to simplify a maintenance and repair process when an abnormal state occurs by separately controlling a plurality of heaters. CONSTITUTION: A display module(130) indicates the operation state of heaters(200-1~200-N). A mainboard(110) displays the temperature and operation state of the heater on the display module. The mainboard comprises a temperature setting part in order to set the reference temperature of the heater. A subboard(120-1~120-N) is mounted in the slot of the mainboard in a card form. The subboard receives a temperature signal from the heater and transmits the signal to the mainboard.