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发明名称
Method and apparatus for creating overlapping patterns on a substrate
摘要
申请公布号
EP2132599(B1)
申请公布日期
2010.10.06
申请号
EP20070860862
申请日期
2007.12.03
申请人
ASML NETHERLANDS B.V.
发明人
MOS, EVERHARDUS CORNELIS;VAN DER SCHAAR, MAURITS;SIMONS, HUBERTUS JOHANNES GERTRUDUS
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
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