LIGHT EMITTING DIODE WITH AIR-GAP AND ITS MANUFACTURE METHOD

摘要

PURPOSE: A semiconductor light emitting device and a manufacturing method thereof are provided to form an air gap through a seed layer on a substrate which includes a concavo-convex part. CONSTITUTION: A substrate includes a plurality of concavo-convex parts. A seed layer is formed on the side and the upper part of the concavo-convex part through a lateral growth process. A semiconductor layer is formed on the seed layer. The semiconductor layer is formed into a cantilever form. An air gap(140) is formed in the lower part of the semiconductor layer.