AN ACTIVE VIBRATION ISOLATION SYSTEM HAVING AN INERTIAL REFERENCE MASS

摘要

An active vibration isolation system comprises a platform (1), an inertial reference mass (4), a support unit (10) for supporting the reference mass (4) without mechanical contact, a first sensor (6) for supplying a signal that is representative for the distance between the reference mass (4) and the platform (1), an actuator (3) for displacing the platform (1) with respect to a bearing body (8), a second sensor (7) for supplying a signal that is representative for the distance between the platform (1) and the bearing body (8), and a control unit (11) for controlling the actuator (3). In accordance with the invention, the support unit (10) is supported by the platform (1).