发明名称 PHASE-CHANGEABLE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PURPOSE: A phase-change memory device and a method for manufacturing the same are provided to prevent the contact between an epitaxial film and a nitride film by eliminating the nitride film pattern of an exposed element isolating film. CONSTITUTION: An element isolating film(124) buries a trench formed on the upper side of a substrate(100). An active region(125) is defined by the element isolating film. An interlayer insulating film pattern(135) includes an opening. The opening exposes the active region and the element isolating film. A spacer(140) is formed on the sidewall of the opening. A diode is formed in the opening. A phase-change material layer is in electrical connection with the diode.</p>
申请公布号 KR20100107617(A) 申请公布日期 2010.10.06
申请号 KR20090025770 申请日期 2009.03.26
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KANG, DAE HWAN;PARK, JUNG HOON
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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