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发明名称
摘要
申请公布号
JP4557505(B2)
申请公布日期
2010.10.06
申请号
JP20030140274
申请日期
2003.05.19
申请人
发明人
分类号
H01L21/20;H01L29/161;H01L21/205;H01L21/324
主分类号
H01L21/20
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代理人
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