| 摘要 |
The sensor has a substrate including a sensor chip (10) on one side and a concave portion on another side. An area of chip disposition on the former side of the substrate corresponds to an area of a concave portion on the latter side of the substrate to form a thin portion. A piezo-resistor is provided in the chip for outputting a sensor signal. A pedestal has a through hole for introducing the pressure to the chip on the thin portion. A gel material (30) is filled in the concave portion and the hole for protecting a diaphragm (14) of the chip, where diameter of the hole is large. |
