SIMULATION SYSTEM AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a simulation system shortening a working period until semiconductor manufacturing equipment and a conveying robot are operated. SOLUTION: The simulation system 1 is provided with: a control device 3 for controlling a processing device equipped with semiconductor manufacturing equipment; a simulation device 2 which simulates a conveying operation executed by a conveying robot for conveying a semiconductor wafer to the processing device according to an operation instruction; and a serial communication cable 4 for communicating the control device 3 with the simulation device 2. The control device 3 transmits a control instruction transmitted to the conveying robot in order to control the conveying operation of the conveying robot to the simulation device 2. The simulation device 2 simulates the conveying operation executed according to the corresponding operation instruction when the transmitted control instruction corresponds to the operation instruction. COPYRIGHT: (C)2010,JPO&INPIT