| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve imprinting accuracy, and to improve a yield, by automatically determining transfer accuracy in a transfer process, by measuring pattern strain in imprinting when press-fitting a mold. Ž<P>SOLUTION: When press-fitting the mold 3 to a transfer object substrate 1, position coordinates of an alignment mark 8 arranged on the mold 3, are measured by an alignment mark detector 12, and a strain quantity of a transfer pattern area on the mold 3 is calculated by performing a recursive analysis from a displacement quantity of the alignment mark 8 in press-fitting. A determination of the transfer accuracy and transfer abnormality are automatically determined with this strain quantity as a decision criterion. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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