摘要 |
PROBLEM TO BE SOLVED: To obtain a dense and flat nano-sheet deposition film having a film thickness of a certain degree and no defect in a single process. SOLUTION: Each predetermined amount of TiO<SB>2</SB>, K<SB>2</SB>CO<SB>3</SB>, Li<SB>2</SB>CO<SB>3</SB>and MoO<SB>3</SB>is weighed and mixed, and the mixture is fired, washed with water to remove impurities, and further treated with HCl to produce a hydrogen type layered crystal. The layered crystal is fed into a solation solution and agitated, and thereby, the layered crystal is exfoliated into monolayers to prepare a nano-sheet dispersion solution having dispersion of titania nano-sheet. At the same time, a substrate 6 is irradiated with UV rays to impart hydrophilicity (a); then the substrate is brought into contact with a silane compound to form an organic molecular film 7 on the surface of the substrate 6 and to impart a surface potential (b). The substrate 6 with the surface potential imparted is immersed in the nano-sheet dispersion solution while irradiated with ultrasonic so as to deposit the titania nano-sheet on the substrate 6 to produce a nano-sheet deposition film 8. COPYRIGHT: (C)2010,JPO&INPIT
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