发明名称 Sputtering Target for Magnetic Recording Film and Method for Manufacturing the Same
摘要 Provided is a sputtering target for a magnetic recording film, in which film formation efficiency and film characteristics can be improved by suppressing growth of crystal grains, reducing magnetic permeability, and increasing density. A method for manufacturing such a sputtering target is also provided. The sputtering target is composed of a matrix phase which includes Co and Pt and a metal oxide phase for example. The sputtering target has a magnetic permeability in the range of 6 to 15 and a relative density of 90% or more.
申请公布号 US2010243435(A1) 申请公布日期 2010.09.30
申请号 US20080739261 申请日期 2008.10.21
申请人 MITSUI MINING & SMELTING CO., LTD. 发明人 KATO KAZUTERU
分类号 C23C14/34;B22F3/10 主分类号 C23C14/34
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