| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a sensor that stabilizes characteristics of a sensor. <P>SOLUTION: The method of manufacturing the sensor, which is formed of a resin film 1 and a metal thin film 2 formed on the resin film 1, sequentially includes a first step of forming the metal thin film 2 on the resin film 1, a second step of carrying out heat annealing treatment on the resin film 1 with the metal thin film 2 formed thereon, and a third step of processing and forming the metal thin film 2, which is subjected to the heat annealing treatment, into the sensor. <P>COPYRIGHT: (C)2010,JPO&INPIT |
