| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and device for positioning and conveying a plate-like member which is relatively heavy and brittle without damaging the member. <P>SOLUTION: A conveyance robot B mounts and positions the glass substrate 100 at grooves constituting first glass substrate reception units 20A, 20B of a positioning unit 12. The first glass substrate reception units 20A, 20B are composed of buffer members, so they receive the glass substrate 100 without any impact. Then when a lifter 74 displaces a conveyance processing unit 14 upward, the glass substrate 100 is transferred to second glass substrate reception units 50A, 50B of the conveyance processing unit 14, and conveyed to a seleniumm processing furnace F by a transfer machine E while being prevented by glass substrate side reception units 32A to 32D, 34A to 34D from being laterally displaced. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
