| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas generation apparatus capable of controlling the liquid level of an electrolyte bath in an electrolytic cell stably to a fixed range with simple constitution. <P>SOLUTION: It is detected by pressure meters 25, 26 whether the pressure in a cathode chamber 3 and the pressure in an anode chamber 4 are equal to or above atmospheric pressure or one of them is lower than atmospheric pressure. It is detected by a first liquid level detecting device 50A whether the liquid level in the cathode chamber 4 shows H or L and it is detected by a second liquid level detecting device 50B whether the liquid level in the anode chamber 4 shows H or L. Opening and closing of an automatic valve 11 of a gaseous hydrogen discharge pipe 7, an automatic valve 15 of a fluorine gas discharge pipe 8 and an automatic valve 21 of a HF supply pipe 20 are controlled based on the detected results of the pressure meters 25, 26, the first liquid level detecting device 50A and the second liquid level detecting device 50B. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
