发明名称 CARBON ELECTRODE, METHOD FOR MANUFACTURING THE SAME, ORGANIC TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To manufacture an organic transistor having a carbon electrode which has low manufacturing cost and can be microfabricated at a simple process. SOLUTION: The organic transistor is manufactured by a step for forming a gate electrode 12 on a substrate 11, a step for forming a gate insulating layer 13 by covering the gate electrode 12, a step for forming a carbon material layer by applying a carbon solution on the gate insulating layer 13, a step for forming a source electrode 15 and a drain electrode by irradiating the carbon material layer with laser light 18 to selectively form a carbon thin film, and a step of forming an organic semiconductor layer by covering the source electrode 15 and the drain electrode. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010219114(A) 申请公布日期 2010.09.30
申请号 JP20090061185 申请日期 2009.03.13
申请人 TOKYO INSTITUTE OF TECHNOLOGY 发明人 MORI TAKEHIKO;WADA TAKU
分类号 H01L21/336;H01L21/28;H01L29/417;H01L29/786;H01L51/05 主分类号 H01L21/336
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