| 摘要 |
PROBLEM TO BE SOLVED: To take an image focused even around a focal point by a confocal displacement meter. SOLUTION: In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode 1, a collimator lens 4, an objective lens 6, a half mirror 3, a diaphragm plate 31, and a photodiode 2. An observation image imaging system OPT-B is a telecentric light receiving optical system, and includes a white light source 94, an objective lens 6, a dichroic mirror 5, a diaphragm plate 81, an imaging lens 82, and an image sensor 9. The collimator lens 4 is swept by an oscillator 7 in a two-headed arrow direction. The diameter of a diaphragm hole of the diaphragm plate 81 is set such that a depth of field of the objective lens 6 is not lower than sweep amplitude of the collimator lens 4. COPYRIGHT: (C)2010,JPO&INPIT
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