| 摘要 |
PROBLEM TO BE SOLVED: To facilitate arranging and adjusting a surface to be measured for performing photometry in a photometric apparatus. SOLUTION: The photometric apparatus 50 has a light source 1, an illumination optics for illuminating the surface 8 to be measured, a condensing optical system for condensing the measuring light flux L<SB>3</SB>reflected by the surface 8, and a spectroscope 11 for measuring the measuring light flux L<SB>5</SB>condensed by the condensing optical system. The apparatus includes a holding stand 19 for holding a sample 7 to be measured, an imaging unit 16 for imaging the surface 8 through the condensing optical system, the iris 21 provided on the light path between the sample 7 to be measured and the imaging unit 16 at least during arrangement and adjustment of the sample 7 to be measured, an operational processing unit 18 for forming brightness distribution deviation data showing the deviation of the brightness distribution from the brightness distribution of the image of the surface 8 imaged by the imaging unit 16, and a monitor 17 for displaying the brightness distribution deviation data formed in the operational processing unit 18. COPYRIGHT: (C)2010,JPO&INPIT
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