| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro mass sensor such as a moisture sensor which has superior heat resistance and durability, and further, is easy to produce at low cost. SOLUTION: The micro mass sensor includes a substrate 3, a metal electrode film 4 deposited on the substrate 3, and a sensitive film 2 deposited over the electrode film 4, wherein the sensitive film 2 is formed with micro carbon fibers made hydrophilic by subjecting the fiber surface to an oxidation treatment. Also, the sensitive film 2 is a film prepared by coating the dispersion liquid of the micro carbon fibers over the electrode film 4 and drying. Preferably, the micro carbon fibers are carbon nanotubes and the substrate is formed with a single crystal of langasite. COPYRIGHT: (C)2010,JPO&INPIT
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