发明名称 SEMICONDUCTOR LIGHT-EMITTING DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor light-emitting device and a manufacturing method are provided, in which a metal film is deposited with positional differences between edges of an insulating film and the metal film, opposite a ridge waveguide top face, utilizing an overhanging-shaped resist pattern. An opening through the insulating film is extended in width without another masking step by etching the insulation film on the ridge waveguide top face, using the metal film as a mask. The contact area between a p-side electrode and a p-type contact layer is increased and operating voltage of the semiconductor light-emitting device is reduced.
申请公布号 US2010244074(A1) 申请公布日期 2010.09.30
申请号 US20100716399 申请日期 2010.03.03
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 OKA TAKAFUMI;ABE SHINJI;KAWASAKI KAZUSHIGE;HORIE JUNICHI;SAKUMA HITOSHI
分类号 H01L33/58 主分类号 H01L33/58
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