| 发明名称 |
MEMS DEVICE WITH REDUCED STRESS IN THE MEMBRANE AND MANUFACTURING METHOD |
| 摘要 |
A MEMS device comprises a membrane layer and a back-plate layer formed over the membrane layer. The membrane layer comprises an outer portion and an inner portion raised relative to the outer portion and a sidewall for connecting the inner portion and the outer portion. The sidewall is non-orthogonal to the outer portion.
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| 申请公布号 |
US2010244162(A1) |
申请公布日期 |
2010.09.30 |
| 申请号 |
US20080678903 |
申请日期 |
2008.09.18 |
| 申请人 |
LAMING RICHARD IAN;JENKINS COLIN ROBERT;TRAYNOR ANTHONY BERNARD |
发明人 |
LAMING RICHARD IAN;JENKINS COLIN ROBERT;TRAYNOR ANTHONY BERNARD |
| 分类号 |
H01L29/84;H01L21/302 |
主分类号 |
H01L29/84 |
| 代理机构 |
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代理人 |
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