| 摘要 |
<p>Provided is a method for manufacturing an SIDM-based drive device, the durability of which is improved as compared with a conventional device. The SIDM-based drive device comprises: a piezoelectric element that expands and contracts in response to an applied voltage; a columnar drive axis formed of a composite material including a resin and a fiber bundle, having the piezoelectric element attached at one end thereof, and displaced by the expansion and contraction of the piezoelectric element; a base member for supporting the piezoelectric element or the drive axis; and a movable body frictionally engaged to the drive axis and moving in the axis direction of the drive axis. In the method for manufacturing the SIDM-based drive device, a lapping process for, in order to expose the resin and the fiber bundle on a sliding surface of the drive axis for the movable body at the same height, planarizing the sliding surface and a polishing process for, in order to remove only the resin on the sliding surface, polishing the sliding surface are performed in this order and then an assembly process for frictionally engaging the movable body to the drive axis is performed.</p> |
