| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflection preventing film having excellent reflection preventing properties, acid resistance and scratch resistance, and to provide an optical element having the same. <P>SOLUTION: In the reflection preventing film 1 formed on the surface of an optical element substrate 2 and formed of a plurality of layers, low refractive index films each formed of SiO<SB>2</SB>and high refractive index films each formed of at least one selected from the group composed of Nb<SB>2</SB>O<SB>5</SB>, Ta<SB>2</SB>O<SB>5</SB>and HfO<SB>2</SB>are alternately layered, each of the layers has a 2 to 150 nm physical film thickness and the total layers have 200 to 700 nm total physical film thicknesses. <P>COPYRIGHT: (C)2010,JPO&INPIT |
