摘要 |
PROBLEM TO BE SOLVED: To obtain an ultraviolet-curable resin material enabling satisfactory pattern transfer. SOLUTION: The ultraviolet-curable resin material for pattern transfer is used which contains 80 to 95 wt.% of isobornyl acrylate, 1 to 20 wt.% of trifunctional acrylate, and 0.5 to 6 wt.% of a polymerization initiator. COPYRIGHT: (C)2010,JPO&INPIT
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