| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoreceptor evaluation device measuring a charged image and a charge characteristic at the same place of the same photoreceptor, and to provide a photoreceptor evaluation method for measuring the charged image (charge leakage) and the charge characteristic on an optional position of the photoreceptor to find the correlation between them. SOLUTION: To evaluate a correlation between the change in feature quantity and the charge characteristic from the change in the feature quantity of the charged image corresponding to the change in an acceleration voltage of charged particles and the change in the charge characteristic, a charged image formed on a photoreceptor sample by an electron gun 31 radiating the charged particles with variable acceleration voltage is detected in an observation area of the photoreceptor sample held inside a sample holder 20. An abutment part is arranged inside the sample holder 20 so that the charged particle irradiation position is matched in measurement of the charge characteristic of the photoreceptor sample, and while regulating the inserting directional position of the photoreceptor sample, the sample holder 20 is placed on a position-adjustable specimen stage 36. COPYRIGHT: (C)2010,JPO&INPIT
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