| 摘要 |
PROBLEM TO BE SOLVED: To provide a microcavity structure having a comparatively simple flow path structure and being suitable for usage to treat a large amount of raw material gas. SOLUTION: A plurality of spherical microcavities which are continuous, whose sizes are controlled and which are communicated mutually are formed between the introducing port and the discharging port of a gas. A catalytic substance is supported on the surface of a wall in the structure forming the microcavities. The thermodynamic non-equilibrium state of a gas molecule where the raw material gas is excited and heated by electromagnetic waves with specific wavelengths close to the electromagnetic wave absorbing band of the raw material gas and otherwise the excitation of a generated gas from the raw material gas is suppressed in the microcavities is formed by that the inside diameters of the microcavities are made those obtaining cavity resonance wavelengths corresponding with the electromagnetic wave absorbing band of the raw material gases, respectively. COPYRIGHT: (C)2010,JPO&INPIT |
