| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement meter capable of accurately measuring displacement of a workpiece, and to provide an optical displacement measurement method. SOLUTION: In the optical displacement meter detecting positional variation of reflected light from the workpiece 40 to measure displacement d of the workpiece 40, a circular aperture 16 is irradiated with light emitted from a light source 12 through a first lens 14 as nearly parallel convergent light. The divergent light emitted from the circular aperture 16 is projected to the workpiece 40 through a second lens 18 as nearly parallel divergent light. COPYRIGHT: (C)2010,JPO&INPIT |
