发明名称 |
AGENT FOR DETOXIFYING DISCHARGE GAS CONTAINING VOLATILE INORGANIC HYDRIDE AND METHOD OF DETOXIFYING DISCHARGE GAS CONTAINING VOLATILE INORGANIC HYDRIDE |
摘要 |
<p>A detoxifying agent and a detoxifying method are provided which have a high detoxifying ability in a detoxifying treatment of a discharge gas containing a volatile inorganic hydride and generating in a semiconductor production step. A zeolite is added to a solid metal hydroxide, a solid metal carbonate, a solid basic metal carbonate, or a mixture of these compounds to thereby obtain the detoxifying agent which has the excellent ability to detoxify a discharge gas containing volatile inorganic hydride. The zeolite to be added is a synthetic zeolite selected from zeolite Y, MFI zeolite, mordenite zeolite, beta zeolite, zeolite A, zeolite X, and zeolite L or is a natural zeolite.</p> |
申请公布号 |
WO2010109671(A1) |
申请公布日期 |
2010.09.30 |
申请号 |
WO2009JP56401 |
申请日期 |
2009.03.27 |
申请人 |
SUED-CHEMIE CATALYSTS JAPAN, INC.;KIM, HYUN-JOONG;SHIOYA, YASUSHI;SUNATA, KENICHIROU |
发明人 |
KIM, HYUN-JOONG;SHIOYA, YASUSHI;SUNATA, KENICHIROU |
分类号 |
B01D53/46;B01D53/02;B01J20/18 |
主分类号 |
B01D53/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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