| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring apparatus enabling easy operation for aligning an imaging device and an inspection object in non-contact three-dimensional measurement. SOLUTION: The three-dimensional shape measuring apparatus includes: an optical probe 20 for imaging the inspection object disposed on a supporting device; an image processing part 52 for measuring the inspection object based on the image of the inspection object imaged by the optical probe 20; drive parts 14, 33 for supporting the supporting device and optical probe 20 such that at least three relative movements among relative rotation movements around three axes perpendicular to one another and relative horizontal movements in the three axis directions are possible; and a drive control part 53 for controlling the supporting device and the optical probe 20 to move relative to each other. The drive control part 53 has a first operation control mode for performing the relative movement control of the optical probe 20 and the supporting device to scan an imaging part on the inspection object by the optical probe 20; and a second operation control mode for performing the relative movement control of the optical probe 20 and the supporting device by maintaining a state that the optical probe 20 can image the imaging part. COPYRIGHT: (C)2010,JPO&INPIT |
