| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress the production cost of a chip, while maintaining the high measuring accuracy of a sensor. Ž<P>SOLUTION: The biochip includes a diaphragm 22 having a first layer 24 and a second layer 25 installed on the first layer 24, and a substrate body 23 installed on the second layer 25 of the diaphragm 22, and also a recess (23A) so as to expose the second layer 24 at least at one of the substrate body 23 or the first layer 24, wherein the first layer 24 is made of a poly-crystalline silicon, an amorphous silicon or a mixture of the amorphous silicon with the poly-crystalline silicon, and the second layer 25 contains silicon dioxide as a main component, and the thickness of the first layer 24 is made smaller than that of the substrate body 23. Thus, it is possible to suppress the production cost of the chip 13, while maintaining the high accuracy of the sensor. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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