| 发明名称 |
METHOD FOR CONFIGURING GAS SUPPLY FOR ELECTRONICS FABRICATION FACILITIES |
| 摘要 |
A system for supplying a reagent to multiple tools in an electronics fabrication facility is configured using a demand probability distribution. In specific examples the reagent is a non-atmospheric or a specialty gas and the demand probability distribution is developed using Monte Carlo statistical techniques.
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| 申请公布号 |
US2010249972(A1) |
申请公布日期 |
2010.09.30 |
| 申请号 |
US20090415221 |
申请日期 |
2009.03.31 |
| 申请人 |
CABRAL JEREMY MICHAEL;CHAKRAVARTI SHRIKAR |
发明人 |
CABRAL JEREMY MICHAEL;CHAKRAVARTI SHRIKAR |
| 分类号 |
G06F17/00 |
主分类号 |
G06F17/00 |
| 代理机构 |
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