摘要 |
Fabry-Perot tunable filters is provided with a first fixed semitransparent mirror and a second movable semitransparent mirror arranged against each other, and piezoelectric elements more than three arranged at an equi-interval on the second movable semitransparent mirror to change a space between the first and second semitransparent mirrors. The second movable semitransparent mirror is adapted to be rotated by using as a pivot an imaginary axis toward which each length of perpendiculars let fall from each of the piezoelectric elements on a plane parallel to the second movable semitransparent mirror and including the imaginary axis connected between arbitrary two points of each middle point between the adjacent piezoelectric elements is equal each other.
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