| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a retention mechanism for an immersion objective lens or an immersion medium, which is configured such that when a specimen is observed and measured, the immersion medium supplied to the tip of an objective lens is hindered from dripping from the tip of the objective lens even if the measurement involves a large amount of movement and takes a long time, and also to provide a method of manufacturing the same. <P>SOLUTION: The retention mechanism for the immersion medium includes: an immersion objective lens 10; a bottom plate 41 with an opening for engaging with the immersion objective lens; a wall 42 disposed around the bottom plate 41; an immersion medium supply section 34 for supplying an immersion medium to the tip of the objective lens; and a droplet discharge part 35 which is disposed near the wall of the bottom plate and discharges a droplet of the immersion medium from the tip of the objective lens. The bottom plate has a first ring member (α portion ) made of a first material for holding the immersion medium, which is disposed so as to surround the opening. The bottom plate inclines so that the opening side is higher than the wall side. The affinity of the first ring member with the immersion medium is lower than that of an inside member of the first ring member with it. <P>COPYRIGHT: (C)2010,JPO&INPIT |
