| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an excellent mass flow meter etc. capable of flexibly coping with a change in the kind of gas etc. of a specimen fluid without necessitating special labor, and moreover accurately measuring a flow. <P>SOLUTION: The mass flow meter includes: a sensor 2 for detecting the flow rate of the specimen fluid G flowing through a flow path 1; a setter 4c for setting a flow rate characteristic function K which is specified to each designated specimen fluid, and determines a flow rate based on an output value from the sensor 2, and an instrumental error correction parameterαwhich is independent of the low rate characteristic function, common to a plurality of the specimen fluids, and corrects an instrument error at each mass flow meter; and a flow calculator 4d for calculating the flow rate of the specimen fluid G based on the characteristic function K and the correction parameterα. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
