| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of inspecting foreign matter during conveyance in a drawing device. SOLUTION: The drawing device 100 includes a drawing section 150 which draws a pattern on a sample 101 coated with a resist film using an electron beam, an L/L chamber 130 of a conveyance system for conveying the sample to the drawing section 150, a CCD camera 10 arranged on the L/L chamber 130 and imaging a surface of the sample 101 being conveyed while moving, and a conveyance stage 20 which moves the CCD camera 10. Consequently, foreign matter can be inspected while a decrease in throughput is suppressed more than before. COPYRIGHT: (C)2010,JPO&INPIT
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