| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning liquid sensor capable of detecting precisely a resistance value of a cleaning liquid. Ž<P>SOLUTION: A change of parallel resonance impedance is detected by a parallel resonance impedance change means 42 connected to a parallel resonance impedance measuring means 41, when secondary side electrodes 12, 13 of an insulation transformer are immersed into the cleaning liquid, at the time when a primary side is parallel-resonated by a high-frequency generating means for conducting parallel resonance by a high-frequency wave exceeding 30 kHz, by a capacitor connected in parallel to a primary side coil 34 of the insulation transformer, and the resistance value of the cleaning liquid is determined based thereon. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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