| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device which has higher efficiency of using a material than that of a conventional technique, and which continuously deposit films on a large number of substrates thereby having a high throughput. SOLUTION: In a film deposition device, a pre-heated organic material is introduced into a film deposition chamber through a supply pipe, further the organic material is introduced into a heated vessel from a nozzle set on the distal end of the supply pipe, the organic material is vaporized due to the heating temperature of the vessel, and film deposition is conducted on the substrate placed at a position overlapping with the vessel. By pre-heating of the organic material, the time required before starting film deposition on the substrate is shortened. COPYRIGHT: (C)2010,JPO&INPIT |
