INFORMATION PROCESSING METHOD, EXPOSURE PROCESSING SYSTEM USING SAME, DEVICE MANUFACTURING METHOD, AND INFORMATION PROCESSING APPARATUS

摘要

The information processing method of the present invention is provided that specifies an extraction period for extracting apparatus data to be generated by an industrial apparatus and analyzes a state of the industrial apparatus based on the apparatus data having an occurrence time within the extraction period. The information processing method includes a period changing step of changing the extraction period so as to enable the apparatus data required for the analysis of the state to be included, when the apparatus data required for the analysis of the state is not included within the extraction period.