| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid jetting head by which the composition of a piezoelectric layer can be approximately unified in the thickness direction by a desired composition so that the composition of the piezoelectric body film may not be separated from a vicinity of an MPB by suppressing the composition inclination, and to provide a manufacturing method for a piezoelectric element. <P>SOLUTION: In this manufacturing method for the liquid jetting head and this manufacturing method for the piezoelectric element, a piezoelectric body layer forming process includes the precursor film forming process, the adjusting film forming process, and the baking process. In this case, in the precursor film forming process, the formation of a piezoelectric body precursor film 71 containing at least zinc (Pb), titanium (Ti) and zirconium (Zr) is performed on a first electrode. In the adjusting film forming process, the formation of a piezoelectric body composition adjusting film which contains at least one of the compositions constituting the piezoelectric body film, and adjusts the composition of the piezoelectric body film is performed. In the barking process, the piezoelectric body precursor film and the piezoelectric body composition adjusting film are collectively baked. <P>COPYRIGHT: (C)2010,JPO&INPIT |
