| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle housing container that prevents contact etc. between a cover and a pellicle, allows performing easy removal operation of the cover, and further prevents generation of a gap between the cover and a pellicle placing table by increasing rigidity of the cover. <P>SOLUTION: The cover 4 of the pellicle housing container 1 includes: an outer peripheral part 10 which contacts with the pellicle placing table 3 when the pellicle is housed; and an inner peripheral part 11 which locates inside the outer peripheral part 10 and does not contact with the pellicle placing table 3. The inner peripheral part 11 includes a ceiling part 20 located in the center and side face parts 21 which connect the ceiling part 20 to the outer peripheral part 10. The side face parts 21 have curvilinear shapes of a plurality of steps including a plurality of curved line segments 21a and 21b whose vertical sections have radius of curvature of 5-50 mm. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
