发明名称 NOZZLE MEMBER AND PROCESS FOR PRODUCING THE SAME
摘要 The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 μm to 100 μm, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.
申请公布号 US2010243764(A1) 申请公布日期 2010.09.30
申请号 US20080671431 申请日期 2008.07.30
申请人 HOKURIKU SEIKEI INDUSTRIAL CO., LTD.;TOKYO ELCTRON LIMITED 发明人 OKESAKU MASAHIRO;MIYAHARA MICHITO
分类号 A62C31/02;C04B35/64 主分类号 A62C31/02
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