HIGH TEMPERATURE SUSCEPTOR HAVING IMPROVED PROCESSING UNIFORMITY

摘要

A susceptor configured to be coupled to a material processing system is described. The susceptor comprises a substrate support comprising a central portion and an edge portion, wherein the central portion has a support surface configured to receive and support a substrate, and the edge portion extends beyond a peripheral edge of the substrate. The susceptor further comprises an edge reflector coupled to the edge portion of the substrate support and configured to partially or fully shield the peripheral edge of the substrate from radiative exchange with an outer region of the material processing system.