| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a structure in which a detection section and a drive section are arranged in appropriate environments, respectively, in a vibration type angular velocity sensor. <P>SOLUTION: The vibration type angular velocity sensor includes: a first cap section 10 which is secured around the detection section 30 in which a detection fixed electrode 38, a detection movable electrode 36 and a detection beam 34 are arranged and is spaced apart from the detection section 30 and covers them, thereby sealing the detection section 30 in a first space 11 on one side of a substrate 1; and second cap section 20 which is secured around the position at which the drive section 40 including a drive movable electrode 42, a drive fixed electrode 43, and a drive beam 41 is arranged and is spaced apart from the drive section 40 and covers the drive section 40, thereby sealing the drive section 40 in a second space 21 which is separated from the first space 11 on one side of the substrate 1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
