| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a charged particle beam-drawing device rapidly displaying the layout of hierarchized data D1. <P>SOLUTION: In this charged particle beam-drawing device 10 including a monitor 10d5 for displaying the layout of hierarchized data D1 for drawing a pattern by a charged particle beam 10a1b, a map MPCL1 having flags in a plurality of sections SC00 to SC45 arranged in a nearly lattice-like form is created; a second element FG2 of a second hierarchy FG is read; whether the flag of the section SC22 corresponding to the position of the second element FG2 of the second hierarchy FG is set in a state ("1") where the layout of the element of the second hierarchy FG cannot be displayed is determined; and, when the flag of the section SC22 corresponding to the position of the second element FG2 of the second hierarchy FG is set in the state ("1") where the layout of the element of the second hierarchy FG cannot be displayed, a process of displaying the layout of the second element FG2 of the second hierarchy FG on the monitor 10d5 is not performed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
