| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical system and a laser beam machining apparatus that can make full use of effect of a laser oscillator, even if energy of a laser pulse contributing to machining per unit area, is limited. <P>SOLUTION: The optical system includes: an oscillator 11 for oscillating a pulse laser beam; a first anamorphic optical element 12 that converts the pulse laser to an elliptical pulse laser having an elliptical cross section; an optical path length difference forming part 16 that, in the cross section of the elliptical pulse laser, causes a difference in the optical path length from the oscillator 11 to a workpiece W; a pulse laser that is made incident on the diffraction optical element of the optical path length difference forming part 16; an optical isolator 13 that varies the optical path of the pulse laser reflected from the diffraction optical element; and a condensing lens 18 that makes the elliptical pulse laser given with the optical path length difference converge on the workpiece W. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
