X-RAY GENERATING DEVICE AND EXAMINING APPARATUS USING SAME

摘要

Disclosed are an X-ray generating device for forming stripe X-rays (multi-line X-rays) having a small width of about several micrometers and an examining apparatus using the same. The X-ray generating device is provided with a tube body (1) the inside of which can be evacuated to a vacuum state, an electron source (2) for generating an electron beam inside the tube body, a target (3) disposed in the tube body and generating X-rays when irradiated with the electron beam emitted from the electron source, and an X-ray output window (34) for outputting the generated X-rays outside the tube body. Grooves (11,...) having a small width are repetitively formed in the surface of a member (31) constituting the target. The electron beam emitted from the electron source is applied to a range of some grooves from the direction perpendicular to the direction in which the grooves extend at a predetermined angle (a) obliquely. Thus, multi-line X-rays from the multi-line target formed between grooves are outputted at an output angle (ß) through the output window (34). The examining apparatus is provided with the above X-ray generating device for outputting multi-line X-rays and an X-ray detecting means for detecting an X-ray image produced by irradiating an object to be examined with multi-line X-rays outputted from the X-ray generating device.