| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor of high age stability that is driven by a battery and selectively detects methane as distinguished from hydrogen. SOLUTION: A heater layer and an electrode layer are disposed on a support layer projecting above a cavity disposed in a silicon substrate, and are covered with a metal oxide semiconductor film for gas detection. The metal oxide semiconductor film includes a first layer that contains stannic oxide and 1-6 pts.wt. of Pt to 100 pts.wt. of stannic oxide and has a thickness of 5-40μm, and a second layer that contains stannic oxide and 1-6 pts.wt. of Pd to 100 pts.wt. of stannic oxide, has a thickness of 15-60μm, and covers the first layer. The total thickness of the first layer and the second layer is 20-80μm. COPYRIGHT: (C)2010,JPO&INPIT
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