MASK CLEANING DEVICE FOR ORGANIC EL, APPARATUS FOR MANUFACTURING DISPLAY FOR ORGANIC EL, DISPLAY FOR ORGANIC EL, AND MASK CLEANING METHOD FOR ORGANIC EL

摘要

<P>PROBLEM TO BE SOLVED: To obtain a high degree of cleaning while removing a vapor deposition substance in a complete non-contact state to a substrate when cleaning is performed to remove the vapor deposition substance sticking to a mask for an organic EL. Ž<P>SOLUTION: A mask cleaning device for an organic EL is used for removing a vapor deposition substance 61 sticking to a mask 1 for the organic EL, and includes: a mask lifting unit 42 for holding the mask 1 for the organic EL in a standing state; a laser scanning part 11 for scanning a laser light to a portion or the whole area of the mask 1 for the organic EL from a horizontal direction; an air supply nozzle 53 for forming an air flow AF directed to the scanning surface 1S side from the rear surface 1R side in each opening part 3 of the mask 1; and a suction nozzle 63 which is arranged at a part lower than the laser light scanning position and has a suction slit 62S directed obliquely upward to suck in a released substance 62 scattered from the mask 1 for the organic EL during cleaning by the laser scanning part 11. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž