发明名称 APPARATUS FOR MASS DIE TESTING
摘要 A test system for testing a large number of dice on a semiconductor wafer without repositioning test probes is disclosed. The test system includes a set of dice under test (DUT) connected together by a plurality of signal buses formed on a semiconductor wafer, at least one test die designed for carrying out tests of the dice under test, the test die having a set of pads to be connected to one or more probes of an external test apparatus, and a probe card with at least one multiplexer implemented in the probe card, such that the test die is capable of receiving signals from the external test apparatus to select any die under test within the set via the multiplexer and the signal buses without repositioning the probes.
申请公布号 US2010244879(A1) 申请公布日期 2010.09.30
申请号 US20100772928 申请日期 2010.05.03
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 HUNG TSUNG-YANG
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
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